Inventor
EVANS ALLEN LEWIS
US3 patents
Patents
3 patentsUS6649541B1Nov 18, 2003
Method for preventing or reducing delamination of deposited insulating layers
ADVANCED MICRO DEVICES INC7 citations68
US6403151B1Jun 11, 2002
Method for controlling optical properties of antireflective coatings
ADVANCED MICRO DEVICES INC3 citations57
US6558963B1May 6, 2003
Method and system for controlling the plasma treatment of a titanium nitride layer formed by a chemical vapor deposition process
ADVANCED MICRO DEVICES INC0 citations48