Inventor
MATSUI ISAO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “MATSUI ISAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
8 patentsUS5403630AApr 4, 1995
Vapor-phase growth method for forming S2 O2 films
TOSHIBA KK458 citations98
US5976992ANov 2, 1999
Method of supplying excited oxygen
TOSHIBA KK40 citations92
US6333246B1Dec 25, 2001
Semiconductor device manufacturing method using electrostatic chuck and semiconductor device manufacturing system
TOSHIBA KK18 citations82
US7678326B2Mar 16, 2010
Method and apparatus for manufacturing fine particles
TOSHIBA KK2 citations62
US6368977B1Apr 9, 2002
Semiconductor device manufacturing method
TOSHIBA KK3 citations60
US7771785B2Aug 10, 2010
Magnetic film and method of manufacturing magnetic film
TOSHIBA KK0 citations51
US7297323B2Nov 20, 2007
Method and apparatus for manufacturing fine particles
TOSHIBA KK1 citations51
US7247188B2Jul 24, 2007
Particle producing method and particle producing apparatus
TOSHIBA KK0 citations51