Inventor

BOGUSLAVSKIY VADIM

US30 patents

⚠️ This page may combine multiple inventors who share the name “BOGUSLAVSKIY VADIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BOGUSLAVSKIY VADIM

VEECO INSTR INC

Reactor having a movable shutter

Reactor having a movable shutter

Wafer carrier with hub

Wafer carrier for growing GaN wafers

Keyed spindle

System and method for increasing the emissivity of a material

Spindle key

Processing methods and apparatus with temperature distribution control

EMCORE CORP

CVD reactor for uniform heating with radiant heating filaments

Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition

Apparatus and method for controlling temperature uniformity of substrates

Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition

Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition

Method and apparatus for measuring the temperature of objects on a fast moving holder

Wafer carrier with flexible wafer flat holder

KRISHNAN SANDEEP

Multi-keyed wafer carrier

Keyed wafer carrier

Keyed spindle

Multi-keyed spindle

Spindle key

Keyed wafer carrier

BOGUSLAVSKIY VADIM

Heated wafer carrier profiling

Heated wafer carrier profiling

Wafer processing method with carrier hub removal

PLANSEE SE

Supporting system for a heating element and heating system

Supporting system for a heating element and heating system

SANDIA CORP

Temperature determination using pyrometry

GURARY ALEXANDER I

Methods and systems for in-situ pyrometer calibration

GURARY ALEX

Processing methods and apparatus with temperature distribution control

PLANKENSTEINER ARNO

Terminal for mechanical support of a heating element