Inventor
SAKAI KATSUHIKO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “SAKAI KATSUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
5 patentsUS5668368ASep 16, 1997
Apparatus for suppressing electrification of sample in charged beam irradiation apparatus
HITACHI LTD98 citations98
US5576538ANov 19, 1996
Apparatus and method for ion beam neutralization
HITACHI LTD47 citations96
US5466929ANov 14, 1995
Apparatus and method for suppressing electrification of sample in charged beam irradiation apparatus
HITACHI LTD37 citations96
US4939360AJul 3, 1990
Particle beam irradiating apparatus having charge suppressing device which applies a bias voltage between a change suppressing particle beam source and the specimen
HITACHI LTD56 citations95
US6043490AMar 28, 2000
Vibration cancellation system for a charged particle beam apparatus
HITACHI LTD17 citations83
HITACHI HIGH TECH CORP
3 patentsUS7214936B2May 8, 2007
Charged particle beam apparatus and dimension measuring method
HITACHI HIGH TECH CORP15 citations92
US7973282B2Jul 5, 2011
Charged particle beam apparatus and dimension measuring method
HITACHI HIGH TECH CORP6 citations74
US8030614B2Oct 4, 2011
Charged particle beam apparatus and dimension measuring method
HITACHI HIGH TECH CORP2 citations63