Inventor
TAKANE ATSUSHI
JP43 patents
⚠️ This page may combine multiple inventors who share the name “TAKANE ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
19 patentsUS7214936B2May 8, 2007
Charged particle beam apparatus and dimension measuring method
HITACHI HIGH TECH CORP15 citations92
US7034296B2Apr 25, 2006
Method of forming a sample image and charged particle beam apparatus
HITACHI HIGH TECH CORP24 citations92
US8041104B2Oct 18, 2011
Pattern matching apparatus and scanning electron microscope using the same
HITACHI HIGH TECH CORP12 citations84
US6756590B2Jun 29, 2004
Shape measurement method and apparatus
HITACHI HIGH TECH CORP14 citations83
US8026491B2Sep 27, 2011
Charged particle beam apparatus and method for charged particle beam adjustment
HITACHI HIGH TECH CORP9 citations80
US7973282B2Jul 5, 2011
Charged particle beam apparatus and dimension measuring method
HITACHI HIGH TECH CORP6 citations74
US7435957B2Oct 14, 2008
Charged particle beam equipment and charged particle microscopy
HITACHI HIGH TECH CORP8 citations74
US8030614B2Oct 4, 2011
Charged particle beam apparatus and dimension measuring method
HITACHI HIGH TECH CORP2 citations63
US7652249B2Jan 26, 2010
Charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations63
US7633063B2Dec 15, 2009
Charged particle beam apparatus
HITACHI HIGH TECH CORP3 citations63
US7433542B2Oct 7, 2008
Method for measuring line and space pattern using scanning electron microscope
HITACHI HIGH TECH CORP2 citations63
US7372047B2May 13, 2008
Charged particle system and a method for measuring image magnification
HITACHI HIGH TECH CORP2 citations63
US7923701B2Apr 12, 2011
Charged particle beam equipment
HITACHI HIGH TECH CORP4 citations62
US7800059B2Sep 21, 2010
Method of forming a sample image and charged particle beam apparatus
HITACHI HIGH TECH CORP3 citations62
US7375330B2May 20, 2008
Charged particle beam equipment
HITACHI HIGH TECH CORP4 citations62
US7361894B2Apr 22, 2008
Method of forming a sample image and charged particle beam apparatus
HITACHI HIGH TECH CORP6 citations62
US7164126B2Jan 16, 2007
Method of forming a sample image and charged particle beam apparatus
HITACHI HIGH TECH CORP5 citations62
US7078688B2Jul 18, 2006
Shape measuring device and shape measuring method
HITACHI HIGH TECH CORP2 citations62
US7459683B2Dec 2, 2008
Charged particle beam device with DF-STEM image valuation method
HITACHI HIGH TECH CORP3 citations57
HITACHI LTD
18 patentsUS6538249B1Mar 25, 2003
Image-formation apparatus using charged particle beams under various focus conditions
HITACHI LTD118 citations99
US7026615B2Apr 11, 2006
Semiconductor inspection system
HITACHI LTD65 citations98
US7642514B2Jan 5, 2010
Charged particle beam apparatus
HITACHI LTD14 citations93
US7236651B2Jun 26, 2007
Image evaluation method and microscope
HITACHI LTD16 citations93
US7109485B2Sep 19, 2006
Charged particle beam apparatus
HITACHI LTD19 citations93
US6936818B2Aug 30, 2005
Charged particle beam apparatus
HITACHI LTD12 citations93
US6864493B2Mar 8, 2005
Charged particle beam alignment method and charged particle beam apparatus
HITACHI LTD36 citations93
US6653633B2Nov 25, 2003
Charged particle beam apparatus
HITACHI LTD22 citations93
US5189369AFeb 23, 1993
NMR imaging method of low flow rate fluid
HITACHI LTD23 citations93
US7235782B2Jun 26, 2007
Semiconductor inspection system
HITACHI LTD43 citations92
US7605381B2Oct 20, 2009
Charged particle beam alignment method and charged particle beam apparatus
HITACHI LTD9 citations84
US7340111B2Mar 4, 2008
Image evaluation method and microscope
HITACHI LTD6 citations74
US7329868B2Feb 12, 2008
Charged particle beam apparatus
HITACHI LTD7 citations74
US6872943B2Mar 29, 2005
Method for determining depression/protrusion of sample and charged particle beam apparatus therefor
HITACHI LTD10 citations74
US5391989AFeb 21, 1995
Magnetic resonance imaging method and apparatus for imaging a fluid portion in a body
HITACHI LTD13 citations74
US5148109ASep 15, 1992
Magnetic resonance imaging method and system therefor
HITACHI LTD10 citations74
US7805023B2Sep 28, 2010
Image evaluation method and microscope
HITACHI LTD3 citations63
US7166840B2Jan 23, 2007
Method for determining depression/protrusion of sample and charged particle beam apparatus therefor
HITACHI LTD3 citations63