Inventor
SOUMAGNE GEORG
JP19 patents
⚠️ This page may combine multiple inventors who share the name “SOUMAGNE GEORG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
7 patentsUS10136510B2Nov 20, 2018
Extreme ultraviolet light generation device
GIGAPHOTON INC4 citations73
US10455679B2Oct 22, 2019
Extreme ultraviolet light generation device
GIGAPHOTON INC1 citations62
US11337292B1May 17, 2022
Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method
GIGAPHOTON INC0 citations53
US9661730B2May 23, 2017
Extreme ultraviolet light generation apparatus with a gas supply toward a trajectory of a target
GIGAPHOTON INC1 citations52
US7006309B2Feb 28, 2006
Prism unit and laser device
GIGAPHOTON INC1 citations52
US11145429B2Oct 12, 2021
Extreme ultraviolet chamber apparatus, extreme ultraviolet light generation system, and method for manufacturing electronic device
GIGAPHOTON INC0 citations50
US8354657B2Jan 15, 2013
Extreme ultra violet light source apparatus
GIGAPHOTON INC0 citations48
UENO YOSHIFUMI
4 patentsUS8067756B2Nov 29, 2011
Extreme ultraviolet light source apparatus
UENO YOSHIFUMI24 citations92
US8492738B2Jul 23, 2013
Apparatus for and method of withdrawing ions in EUV light production apparatus
UENO YOSHIFUMI6 citations83
US8513630B2Aug 20, 2013
Extreme ultraviolet light source apparatus
UENO YOSHIFUMI2 citations62
US8288743B2Oct 16, 2012
Apparatus for and method of withdrawing ions in EUV light production apparatus
UENO YOSHIFUMI4 citations62
MORIYA MASATO
4 patentsUS8198613B2Jun 12, 2012
Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device
MORIYA MASATO12 citations84
US8592787B2Nov 26, 2013
Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device
MORIYA MASATO3 citations62
US8227778B2Jul 24, 2012
Semiconductor exposure device using extreme ultra violet radiation
MORIYA MASATO3 citations62
US8507885B2Aug 13, 2013
Semiconductor exposure device using extreme ultra violet radiation
MORIYA MASATO0 citations52