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Inventor
DENG ZE XI
CN
2 patents
⚠️ This page may combine multiple inventors who share the name “DENG ZE XI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HUNG CHI YUAN
1 patent
US8501376B2
Aug 6, 2013
System and method for test pattern for lithography process
HUNG CHI YUAN
5 citations
75
SEMICONDUCTOR MFG INT SHANGHAI
1 patent
US8921013B2
Dec 30, 2014
System and method for test pattern for lithography process
SEMICONDUCTOR MFG INT SHANGHAI
0 citations
46