Inventor

ZHANG LI GUO

CN2 patents

⚠️ This page may combine multiple inventors who share the name “ZHANG LI GUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HUNG CHI YUAN

1 patent

US8501376B2Aug 6, 2013

System and method for test pattern for lithography process

HUNG CHI YUAN5 citations75

SEMICONDUCTOR MFG INT SHANGHAI

1 patent

US8921013B2Dec 30, 2014

System and method for test pattern for lithography process

SEMICONDUCTOR MFG INT SHANGHAI0 citations46