Inventor
TRENKLER JOHANN
DE13 patents
⚠️ This page may combine multiple inventors who share the name “TRENKLER JOHANN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
4 patentsUS7116394B2Oct 3, 2006
Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system
ZEISS CARL SMT AG31 citations92
US7646004B2Jan 12, 2010
Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element
ZEISS CARL SMT AG2 citations58
US7629055B2Dec 8, 2009
Protective coating system for reflective optical elements, reflective optical element and method for the production thereof
ZEISS CARL SMT AG1 citations51
US7429116B2Sep 30, 2008
Projection objective and method for its manufacture
ZEISS CARL SMT AG1 citations51
ZEISS CARL SMT GMBH
3 patentsUS7952797B2May 31, 2011
Reflective optical element and EUV lithography appliance
ZEISS CARL SMT GMBH6 citations72
US8891163B2Nov 18, 2014
Reflective optical element and EUV lithography appliance
ZEISS CARL SMT GMBH2 citations61
US9910193B2Mar 6, 2018
Reflective optical element and EUV lithography appliance
ZEISS CARL SMT GMBH0 citations51