Inventor

KATE NICOLAAS TEN

NL7 patents

⚠️ This page may combine multiple inventors who share the name “KATE NICOLAAS TEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US7705962B2Apr 27, 2010

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV12 citations92

US7256864B2Aug 14, 2007

Liquid immersion lithography system having a tilted showerhead relative to a substrate

ASML NETHERLANDS BV7 citations71

US9746788B2Aug 29, 2017

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations58

KEMPER NICOLAAS RUDOLF

1 patent

US8446563B2May 21, 2013

Lithographic apparatus and device manufacturing method

KEMPER NICOLAAS RUDOLF6 citations83

CADEE THEODORUS PETRUS MARIA

1 patent

US9268242B2Feb 23, 2016

Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor

CADEE THEODORUS PETRUS MARIA4 citations82

LEENDERS MARTINUS HENDRIKUS ANTONIUS

1 patent

US8421996B2Apr 16, 2013

Lithographic apparatus

LEENDERS MARTINUS HENDRIKUS ANTONIUS7 citations81

BECKERS MARCEL

1 patent

US8988651B2Mar 24, 2015

Lithographic apparatus and device manufacturing method

BECKERS MARCEL0 citations50