Inventor
MIGCHELBRINK FERDY
NL19 patents
⚠️ This page may combine multiple inventors who share the name “MIGCHELBRINK FERDY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
14 patentsUS7411654B2Aug 12, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations92
US9857695B2Jan 2, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US10495984B2Dec 3, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US10209629B2Feb 19, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US7411658B2Aug 12, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations73
US10216100B2Feb 26, 2019
Inspection substrate and an inspection method
ASML NETHERLANDS BV2 citations69
US7130019B2Oct 31, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations60
US11086239B2Aug 10, 2021
Cleaning device and method of cleaning
ASML NETHERLANDS BV0 citations55
US12292696B2May 6, 2025
Fluid purging system, projection system, illumination system, lithographic apparatus, and method
ASML NETHERLANDS BV0 citations53
US10802410B2Oct 13, 2020
Lithographic apparatus and device manufacturing method involving a barrier structure to handle liquid
ASML NETHERLANDS BV0 citations52
US9429853B2Aug 30, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US8004654B2Aug 23, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10725390B2Jul 28, 2020
Inspection substrate and an inspection method
ASML NETHERLANDS BV0 citations48
US12411425B2Sep 9, 2025
Fluid purging system
ASML NETHERLANDS BV0 citations38
BECKERS MARCEL
4 patentsUS8976334B2Mar 10, 2015
Lithographic apparatus and device manufacturing method
BECKERS MARCEL1 citations61
US8958054B2Feb 17, 2015
Lithographic apparatus and device manufacturing method
BECKERS MARCEL0 citations51
US8259287B2Sep 4, 2012
Lithographic apparatus and device manufacturing method
BECKERS MARCEL0 citations51
US8988651B2Mar 24, 2015
Lithographic apparatus and device manufacturing method
BECKERS MARCEL0 citations50