Inventor
EVERS ELMAR
NL8 patents
⚠️ This page may combine multiple inventors who share the name “EVERS ELMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS7411654B2Aug 12, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations92
US9857695B2Jan 2, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US10495984B2Dec 3, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US10209629B2Feb 19, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US9429853B2Aug 30, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
BECKERS MARCEL
3 patentsUS8976334B2Mar 10, 2015
Lithographic apparatus and device manufacturing method
BECKERS MARCEL1 citations61
US8259287B2Sep 4, 2012
Lithographic apparatus and device manufacturing method
BECKERS MARCEL0 citations51
US8988651B2Mar 24, 2015
Lithographic apparatus and device manufacturing method
BECKERS MARCEL0 citations50