Inventor
SCHUEGRAF KLAUS
US24 patents
⚠️ This page may combine multiple inventors who share the name “SCHUEGRAF KLAUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
4 patentsUS5786248AJul 28, 1998
Semiconductor processing method of forming a tantalum oxide containing capacitor
MICRON TECHNOLOGY INC61 citations96
US6071771AJun 6, 2000
Semiconductor processing method of forming a capacitor and capacitor constructions
MICRON TECHNOLOGY INC38 citations92
US6090685AJul 18, 2000
Method of forming a LOCOS trench isolation structure
MICRON TECHNOLOGY INC9 citations74
US6809395B1Oct 26, 2004
Isolation structure having trench structures formed on both side of a locos
MICRON TECHNOLOGY INC4 citations63
APPLIED MATERIALS INC
3 patentsUS8709953B2Apr 29, 2014
Pulsed plasma with low wafer temperature for ultra thin layer etches
APPLIED MATERIALS INC12 citations84
US9502294B2Nov 22, 2016
Method and system for wafer level singulation
APPLIED MATERIALS INC0 citations52
US9232569B2Jan 5, 2016
Solid state light source assisted processing
APPLIED MATERIALS INC0 citations51
SEKAR DEEPAK C
3 patentsSANDISK CORP
2 patentsNEWPORT FAB LLC
2 patentsKUEHNLE MANFRED R
2 patentsUS5679412AOct 21, 1997
Method and apparatus for producing gas impermeable, chemically inert container structures for food and volatile substances
KUEHNLE MANFRED R83 citations93
US5211995AMay 18, 1993
Method of protecting an organic surface by deposition of an inorganic refractory coating thereon
KUEHNLE MANFRED R51 citations91