P

Inventor

JAKATDAR NICKHIL

US48 patents
⚠️ This page may combine multiple inventors who share the name “JAKATDAR NICKHIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TIMBRE TECH INC

34 patents
US6943900B2Sep 13, 2005

Generation of a library of periodic grating diffraction signals

TIMBRE TECH INC231 citations99
US6785638B2Aug 31, 2004

Method and system of dynamic learning through a regression-based library generation process

TIMBRE TECH INC315 citations99
US6772084B2Aug 3, 2004

Overlay measurements using periodic gratings

TIMBRE TECH INC203 citations99
US6721691B2Apr 13, 2004

Metrology hardware specification using a hardware simulator

TIMBRE TECH INC162 citations99
US6699624B2Mar 2, 2004

Grating test patterns and methods for overlay metrology

TIMBRE TECH INC210 citations99
US6608690B2Aug 19, 2003

Optical profilometry of additional-material deviations in a periodic grating

TIMBRE TECH INC179 citations99
US7330279B2Feb 12, 2008

Model and parameter selection for optical metrology

TIMBRE TECH INC58 citations98
US7072049B2Jul 4, 2006

Model optimization for structures with additional materials

TIMBRE TECH INC69 citations98
US6768983B1Jul 27, 2004

System and method for real-time library generation of grating profiles

TIMBRE TECH INC176 citations98
US6609086B1Aug 19, 2003

Profile refinement for integrated circuit metrology

TIMBRE TECH INC113 citations98
US7064829B2Jun 20, 2006

Generic interface for an optical metrology system

TIMBRE TECH INC47 citations96
US7092110B2Aug 15, 2006

Optimized model and parameter selection for optical metrology

TIMBRE TECH INC68 citations95
US7277189B2Oct 2, 2007

Generation of a library of periodic grating diffraction signals

TIMBRE TECH INC21 citations93
US7136796B2Nov 14, 2006

Generation and use of integrated circuit profile-based simulation information

TIMBRE TECH INC32 citations93
US7031894B2Apr 18, 2006

Generating a library of simulated-diffraction signals and hypothetical profiles of periodic gratings

TIMBRE TECH INC40 citations93
US6928395B2Aug 9, 2005

Method and system for dynamic learning through a regression-based library generation process

TIMBRE TECH INC28 citations93
US6855464B2Feb 15, 2005

Grating test patterns and methods for overlay metrology

TIMBRE TECH INC35 citations93
US6839145B2Jan 4, 2005

Optical profilometry of additional-material deviations in a periodic grating

TIMBRE TECH INC25 citations93
US6743646B2Jun 1, 2004

Balancing planarization of layers and the effect of underlying structure on the metrology signal

TIMBRE TECH INC20 citations93
US6538731B2Mar 25, 2003

System and method for characterizing macro-grating test patterns in advanced lithography and etch processes

TIMBRE TECH INC30 citations93
US6636843B2Oct 21, 2003

System and method for grating profile classification

TIMBRE TECH INC44 citations92
US7216045B2May 8, 2007

Selection of wavelengths for integrated circuit optical metrology

TIMBRE TECH INC22 citations90
US6792328B2Sep 14, 2004

Metrology diffraction signal adaptation for tool-to-tool matching

TIMBRE TECH INC48 citations89
US7450232B2Nov 11, 2008

Generic interface for an optical metrology system

TIMBRE TECH INC9 citations84
US7394554B2Jul 1, 2008

Selecting a hypothetical profile to use in optical metrology

TIMBRE TECH INC10 citations82
US7505153B2Mar 17, 2009

Model and parameter selection for optical metrology

TIMBRE TECH INC5 citations74
US7271902B2Sep 18, 2007

Generic interface for an optical metrology system

TIMBRE TECH INC9 citations74
US6750961B2Jun 15, 2004

System and method for characterizing macro-grating test patterns in advanced lithography and etch processes

TIMBRE TECH INC12 citations74
US6645824B1Nov 11, 2003

Combined optical profilometry and projection microscopy of integrated circuit structures

TIMBRE TECH INC11 citations73
US6833914B1Dec 21, 2004

System and method for efficient simulation of reflectometry response from two-dimensional grating structures

TIMBRE TECH INC6 citations63
US6608686B1Aug 19, 2003

Measurement of metal electroplating and seed layer thickness and profile

TIMBRE TECH INC6 citations62
US7041515B2May 9, 2006

Balancing planarization of layers and the effect of underlying structure on the metrology signal

TIMBRE TECH INC0 citations52
US6961679B2Nov 1, 2005

Method and system of dynamic learning through a regression-based library generation process

TIMBRE TECH INC0 citations52
US7474993B2Jan 6, 2009

Selection of wavelengths for integrated circuit optical metrology

TIMBRE TECH INC0 citations51

TOKYO ELECTRON LTD

3 patents

CHAN KEVIN

3 patents

Vuclip

2 patents

CADENCE DESIGN SYSTEMS INC

2 patents

NAT SEMICONDUCTOR CORP

1 patent

PCCW VUCLIP SINGAPORE PTE LTD

1 patent

VUCLIP (SINGAPORE) PTE LTD

1 patent

SONG LI J

1 patent