Inventor
JAKATDAR NICKHIL
US48 patents
⚠️ This page may combine multiple inventors who share the name “JAKATDAR NICKHIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TIMBRE TECH INC
34 patentsUS6943900B2Sep 13, 2005
Generation of a library of periodic grating diffraction signals
TIMBRE TECH INC231 citations99
US6785638B2Aug 31, 2004
Method and system of dynamic learning through a regression-based library generation process
TIMBRE TECH INC315 citations99
US6772084B2Aug 3, 2004
Overlay measurements using periodic gratings
TIMBRE TECH INC203 citations99
US6721691B2Apr 13, 2004
Metrology hardware specification using a hardware simulator
TIMBRE TECH INC162 citations99
US6699624B2Mar 2, 2004
Grating test patterns and methods for overlay metrology
TIMBRE TECH INC210 citations99
US6608690B2Aug 19, 2003
Optical profilometry of additional-material deviations in a periodic grating
TIMBRE TECH INC179 citations99
US7330279B2Feb 12, 2008
Model and parameter selection for optical metrology
TIMBRE TECH INC58 citations98
US7072049B2Jul 4, 2006
Model optimization for structures with additional materials
TIMBRE TECH INC69 citations98
US6768983B1Jul 27, 2004
System and method for real-time library generation of grating profiles
TIMBRE TECH INC176 citations98
US6609086B1Aug 19, 2003
Profile refinement for integrated circuit metrology
TIMBRE TECH INC113 citations98
US7064829B2Jun 20, 2006
Generic interface for an optical metrology system
TIMBRE TECH INC47 citations96
US7092110B2Aug 15, 2006
Optimized model and parameter selection for optical metrology
TIMBRE TECH INC68 citations95
US7277189B2Oct 2, 2007
Generation of a library of periodic grating diffraction signals
TIMBRE TECH INC21 citations93
US7136796B2Nov 14, 2006
Generation and use of integrated circuit profile-based simulation information
TIMBRE TECH INC32 citations93
US7031894B2Apr 18, 2006
Generating a library of simulated-diffraction signals and hypothetical profiles of periodic gratings
TIMBRE TECH INC40 citations93
US6928395B2Aug 9, 2005
Method and system for dynamic learning through a regression-based library generation process
TIMBRE TECH INC28 citations93
US6855464B2Feb 15, 2005
Grating test patterns and methods for overlay metrology
TIMBRE TECH INC35 citations93
US6839145B2Jan 4, 2005
Optical profilometry of additional-material deviations in a periodic grating
TIMBRE TECH INC25 citations93
US6743646B2Jun 1, 2004
Balancing planarization of layers and the effect of underlying structure on the metrology signal
TIMBRE TECH INC20 citations93
US6538731B2Mar 25, 2003
System and method for characterizing macro-grating test patterns in advanced lithography and etch processes
TIMBRE TECH INC30 citations93
US6636843B2Oct 21, 2003
System and method for grating profile classification
TIMBRE TECH INC44 citations92
US7216045B2May 8, 2007
Selection of wavelengths for integrated circuit optical metrology
TIMBRE TECH INC22 citations90
US6792328B2Sep 14, 2004
Metrology diffraction signal adaptation for tool-to-tool matching
TIMBRE TECH INC48 citations89
US7450232B2Nov 11, 2008
Generic interface for an optical metrology system
TIMBRE TECH INC9 citations84
US7394554B2Jul 1, 2008
Selecting a hypothetical profile to use in optical metrology
TIMBRE TECH INC10 citations82
US7505153B2Mar 17, 2009
Model and parameter selection for optical metrology
TIMBRE TECH INC5 citations74
US7271902B2Sep 18, 2007
Generic interface for an optical metrology system
TIMBRE TECH INC9 citations74
US6750961B2Jun 15, 2004
System and method for characterizing macro-grating test patterns in advanced lithography and etch processes
TIMBRE TECH INC12 citations74
US6645824B1Nov 11, 2003
Combined optical profilometry and projection microscopy of integrated circuit structures
TIMBRE TECH INC11 citations73
US6833914B1Dec 21, 2004
System and method for efficient simulation of reflectometry response from two-dimensional grating structures
TIMBRE TECH INC6 citations63
US6608686B1Aug 19, 2003
Measurement of metal electroplating and seed layer thickness and profile
TIMBRE TECH INC6 citations62
US7041515B2May 9, 2006
Balancing planarization of layers and the effect of underlying structure on the metrology signal
TIMBRE TECH INC0 citations52
US6961679B2Nov 1, 2005
Method and system of dynamic learning through a regression-based library generation process
TIMBRE TECH INC0 citations52
US7474993B2Jan 6, 2009
Selection of wavelengths for integrated circuit optical metrology
TIMBRE TECH INC0 citations51
TOKYO ELECTRON LTD
3 patentsUS7831528B2Nov 9, 2010
Optical metrology of structures formed on semiconductor wafers using machine learning systems
TOKYO ELECTRON LTD29 citations92
US7580823B2Aug 25, 2009
Generation and use of integrated circuit profile-based simulation information
TOKYO ELECTRON LTD9 citations84
US7593119B2Sep 22, 2009
Generation of a library of periodic grating diffraction signals
TOKYO ELECTRON LTD5 citations74
CHAN KEVIN
3 patentsUS8407630B1Mar 26, 2013
Modeling and cross correlation of design predicted criticalities for optimization of semiconductor manufacturing
CHAN KEVIN11 citations82
US8146024B2Mar 27, 2012
Method and system for process optimization
CHAN KEVIN4 citations61
US8156450B2Apr 10, 2012
Method and system for mask optimization
CHAN KEVIN1 citations51
Vuclip
2 patentsCADENCE DESIGN SYSTEMS INC
2 patentsUS7694244B2Apr 6, 2010
Modeling and cross correlation of design predicted criticalities for optimization of semiconductor manufacturing
CADENCE DESIGN SYSTEMS INC19 citations92
US7665048B2Feb 16, 2010
Method and system for inspection optimization in design and production of integrated circuits
CADENCE DESIGN SYSTEMS INC8 citations83