Inventor

FISH ROGER B

US19 patents

⚠️ This page may combine multiple inventors who share the name “FISH ROGER B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FISH ROGER B

VARIAN SEMICONDUCTOR EQUIPMENT

Force sensing system for substrate lifting apparatus

Fluid delivery mechanism for vacuum wafer processing system

Optical heater for cryogenic ion implanter surface regeneration

Technique for temperature measurement and calibration of semiconductor workpieces using infrared

Technique for limiting transmission of fault current

Heated platen with improved temperature uniformity

Technique for limiting transmission of fault current

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Cryogenic ferrofluid sealed rotary union

Gas coupled probe for substrate temperature measurement

Wafer platen thermosyphon cooling system

System and apparatus for holding a substrate over wide temperature range

Platen support structure

FISH ROGER B

In vacuum optical wafer heater for cryogenic processing

Techniques for changing temperature of a platen

Vacuum insulated cryogenic fluid transfer hose

Vacuum insulated fitting enclosure

APPLIED MATERIALS INC

Linear actuated 3 way spool valve with constant total flow

(unassigned)

Wafer pedestal tilt mechanism and cooling system

TEKLETSADIK KASEGN D

Technique for limiting transmission of fault current