Inventor

WU CHANG-MING

TW98 patents

⚠️ This page may combine multiple inventors who share the name “WU CHANG-MING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WU CHANG-MING

TAIWAN SEMICONDUCTOR MFG CO LTD

Memory cell structure for improving erase speed

RRAM device

Self-aligned split gate flash memory

Si recess method in HKMG replacement gate technology

Sidewall stopper for MEMS device

Si recess method in HKMG replacement gate technology

Capacitor structure and method of manufacturing the same

Asymmetric formation approach for a floating gate of a split gate flash memory structure

HK embodied flash memory and methods of forming the same

Split gate flash memory structure and method of making the split gate flash memory structure

Recess with tapered sidewalls for hermetic seal in MEMS devices

Structure with emedded EFS3 and FinFET device

CMP fabrication solution for split gate memory embedded in HK-MG process

Split gate memory device for improved erase speed

MEMS device having a metallization structure embedded in a dielectric structure with laterally offset sidewalls of a first portion and a second portion

Method for manufacturing a MEMS device by first hybrid bonding a CMOS wafer to a MEMS wafer

Fence structure to prevent stiction in a MEMS motion sensor

Semiconductor structure for flash memory cells and method of making same

Method for manufacturing a MEMS device by first hybrid bonding a CMOS wafer to a MEMS wafer

Biosensor field effect transistor having specific well structure and method of forming the same

Formation method of MEMS device structure with cavities

Memory devices and method of fabricating same

Method for forming a split-gate flash memory cell device with a low power logic device

Method for preventing floating gate variation

Self-aligned flash memory device with word line having reduced height at outer edge opposite to gate stack

Structure and method to reduce polysilicon loss from flash memory devices during replacement gate (RPG) process in integrated circuits

Memory devices and method of fabricating same

Split gate flash memory structure with a damage free select gate and a method of making the split gate flash memory structure

Method for forming a split-gate flash memory cell device with a low power logic device

Dual control gate spacer structure for embedded flash memory

Split gate cells for embedded flash memory

Semiconductor device structure and method for forming the same

Self-aligned split gate flash memory having liner-separated spacers above the memory gate

Memory gate first approach to forming a split gate flash memory cell device

Method for forming a hard mask with a tapered profile

Phase change memory structure to reduce leakage from the heating element to the surrounding material

Process and related device for removing by-product on semiconductor processing chamber sidewalls

Split gate memory device and method of fabricating the same

Memory devices and method of fabricating same

Split gate memory device and method of fabricating the same

Memory devices and method of fabricating same

Fence structure to prevent stiction in a MEMS motion sensor

Split gate memory device and method of fabricating the same

Approach for ultra thin-film transfer and handling

Split gate memory devices and methods of manufacturing

Memory devices and method of forming same

Memory devices and method of forming same

TAIWAN SEMICONDUCTOR MFG

HK embodied flash memory and methods of forming the same

Memory devices and method of forming same

Memory devices and method of fabricating same