Inventor
PRIESTLEY RICHARD S
US6 patents
Patents
6 patentsUS6410192B1Jun 25, 2002
Photolithography method, photolithography mask blanks, and method of making
CORNING INC19 citations90
US6475682B2Nov 5, 2002
Photolithography method, photolithography mask blanks, and method of making
CORNING INC6 citations71
US6317209B1Nov 13, 2001
Automated system for measurement of an optical property
CORNING INC12 citations71
US6765671B2Jul 20, 2004
Automated system for measurement of an optical property
CORNING INC6 citations60
US6758063B2Jul 6, 2004
Photolithography method, photolithography mask blanks, and method of making
CORNING INC3 citations60
US7001462B2Feb 21, 2006
Method for making an oriented optical fluoride crystal blank
CORNING INC2 citations52