Inventor
THOMAS TIMOTHY SCOTT
US10 patents
⚠️ This page may combine multiple inventors who share the name “THOMAS TIMOTHY SCOTT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
8 patentsUS10253412B2Apr 9, 2019
Deposition apparatus including edge plenum showerhead assembly
LAM RES CORP8 citations83
US11837443B2Dec 5, 2023
Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression
LAM RES CORP1 citations69
US10984987B2Apr 20, 2021
Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression
LAM RES CORP4 citations69
US10190216B1Jan 29, 2019
Showerhead tilt mechanism
LAM RES CORP5 citations68
US11515124B2Nov 29, 2022
Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression
LAM RES CORP0 citations59
US11819970B2Nov 21, 2023
Knurling edge driving tool
LAM RES CORP0 citations58
US10760160B2Sep 1, 2020
Showerhead tilt mechanism
LAM RES CORP0 citations48
US12486574B2Dec 2, 2025
Thermally controlled chandelier showerhead
LAM RES CORP0 citations44