Inventor
MAASS WOLFRAM
DE10 patents
⚠️ This page may combine multiple inventors who share the name “MAASS WOLFRAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEYBOLD AG
4 patentsUS5611899AMar 18, 1997
Device for suppressing flashovers in cathode sputtering installations
LEYBOLD AG105 citations96
US5284564AFeb 8, 1994
Magnetron sputtering cathode for vacuum coating apparatus
LEYBOLD AG77 citations95
US5399252AMar 21, 1995
Apparatus for coating a substrate by magnetron sputtering
LEYBOLD AG36 citations92
US5182003AJan 26, 1993
Stationary magnetron sputtering cathode for a vacuum coating apparatus
LEYBOLD AG41 citations91