Inventor
HSU FENG YUAN
TW12 patents
Patents
12 patentsUS11307489B2Apr 19, 2022
EUV photomask and manufacturing method of the same
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US11782338B2Oct 10, 2023
EUV photomask and manufacturing method of the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11287745B2Mar 29, 2022
Reticle-masking structure, extreme ultraviolet apparatus, and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10866519B1Dec 15, 2020
Reticle-masking structure, extreme ultraviolet apparatus, and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US12235573B2Feb 25, 2025
EUV photomask and manufacturing method of the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11255658B2Feb 22, 2022
Ellipsometer and method for estimating thickness of film
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11199767B2Dec 14, 2021
Apparatus and method for generating an electromagnetic radiation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10760896B2Sep 1, 2020
Ellipsometer and method for estimating thickness of film
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US10509311B1Dec 17, 2019
Apparatus and method for generating an electromagnetic radiation
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12066760B2Aug 20, 2024
Reticle-masking structure, extreme ultra violet apparatus, and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11260495B2Mar 1, 2022
Apparatus and methods for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US10880982B2Dec 29, 2020
Light generation system using metal-nonmetal compound as precursor and related light generation method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51