Inventor

EVANS MORGAN D

US28 patents

⚠️ This page may combine multiple inventors who share the name “EVANS MORGAN D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EVANS MORGAN D

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Techniques and structure for forming thin silicon-on-insulator materials

Semiconductor workpiece temperature measurement system

Device and method for substrate heating during transport

Three dimensional structure fabrication control using novel processing system

Selective processing of a workpiece

Techniques for forming isolation structures in a substrate

Hybrid thermal electrostatic clamp

Low particle capacitively coupled components for workpiece processing

Critical dimensions variance compensation

Semiconductor workpiece temperature measurement system

Electrostatic chuck with LED heating

Apparatus for heating and processing a substrate

Sputter etch material selectivity

Apparatus and method for controlling implant process

Substrate handling and heating system

Workpiece processing technique

VARIAN SEMICONDUCTOR EQUIPMENT

Technique for high-efficiency ion implantation

Techniques for improved uniformity tuning in an ion implanter system

Dynamic heating method and system for wafer processing

Ion beam current uniformity monitor, ion implanter and related method

Technique for uniformity tuning in an ion implanter system

Load lock vacuum conductance limiting aperture

Magnetic monitoring of a Faraday cup for an ion implanter

GODET LUDOVIC

Method of etching a workpiece

Method of implanting a workpiece to improve growth of a compound semiconductor

Method for epitaxial layer overgrowth

EVANS MORGAN D

Heteroepitaxial growth using ion implantation

Compound semiconductor growth using ion implantation