Inventor
SAITO KAZUHIDE
JP12 patents
⚠️ This page may combine multiple inventors who share the name “SAITO KAZUHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
6 patentsUS10580668B2Mar 3, 2020
Substrate processing apparatus and substrate processing method using substrate processing apparatus
SCREEN HOLDINGS CO LTD5 citations72
US9543162B2Jan 10, 2017
Substrate processing method
SCREEN HOLDINGS CO LTD2 citations72
US9431277B2Aug 30, 2016
Substrate treatment method and substrate treatment apparatus
SCREEN HOLDINGS CO LTD3 citations72
US10755951B2Aug 25, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD2 citations69
US10211063B2Feb 19, 2019
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD5 citations68
US9997382B2Jun 12, 2018
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations48