Inventor
KIM KYOUNG-SEOK
KR13 patents
⚠️ This page may combine multiple inventors who share the name “KIM KYOUNG-SEOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
10 patentsUS7396719B2Jul 8, 2008
Method of forming high dielectric film using atomic layer deposition and method of manufacturing capacitor having the high dielectric film
SAMSUNG ELECTRONICS CO LTD18 citations83
US6828254B2Dec 7, 2004
Plasma enhanced chemical vapor deposition apparatus and method for forming nitride layer using the same
SAMSUNG ELECTRONICS CO LTD14 citations82
US7201807B2Apr 10, 2007
Method for cleaning a deposition chamber and deposition apparatus for performing in situ cleaning
SAMSUNG ELECTRONICS CO LTD8 citations72
US6989338B2Jan 24, 2006
Method for forming a multi-layered structure of a semiconductor device and methods for forming a capacitor and a gate insulation layer using the multi-layered structure
SAMSUNG ELECTRONICS CO LTD10 citations71
US6794263B1Sep 21, 2004
Method of manufacturing a semiconductor device including alignment mark
SAMSUNG ELECTRONICS CO LTD8 citations71
US7119392B2Oct 10, 2006
Storage electrode of a semiconductor device and method of forming the same
SAMSUNG ELECTRONICS CO LTD2 citations62
US6815370B2Nov 9, 2004
Plasma enhanced chemical vapor deposition apparatus and method for forming nitride layer using the same
SAMSUNG ELECTRONICS CO LTD4 citations61
US8039054B2Oct 18, 2011
Layer deposition methods
SAMSUNG ELECTRONICS CO LTD2 citations60
US7238585B2Jul 3, 2007
Method of forming a storage electrode of a semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations52
US8039900B2Oct 18, 2011
Stacked semiconductor devices and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations37