Inventor
KIM HWA-SIK
KR5 patents
⚠️ This page may combine multiple inventors who share the name “KIM HWA-SIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
2 patentsUS6828254B2Dec 7, 2004
Plasma enhanced chemical vapor deposition apparatus and method for forming nitride layer using the same
SAMSUNG ELECTRONICS CO LTD14 citations82
US6815370B2Nov 9, 2004
Plasma enhanced chemical vapor deposition apparatus and method for forming nitride layer using the same
SAMSUNG ELECTRONICS CO LTD4 citations61