Inventor

KITAYAMA TOYOKI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “KITAYAMA TOYOKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUBISHI ELECTRIC CORP

3 patents

US6735275B2May 11, 2004

X-ray exposure method, x-ray exposure apparatus, fine structure and semiconductor device

MITSUBISHI ELECTRIC CORP4 citations59

US6947519B2Sep 20, 2005

X-ray exposure apparatus and method, semiconductor manufacturing apparatus, and microstructure

MITSUBISHI ELECTRIC CORP0 citations51

US6760400B2Jul 6, 2004

Exposing method and semiconductor device fabricated by the exposing method

MITSUBISHI ELECTRIC CORP1 citations49

HITACHI LTD

1 patent

US5036290AJul 30, 1991

Synchrotron radiation generation apparatus

HITACHI LTD53 citations94

CANON KK

1 patent

US6947518B2Sep 20, 2005

X-ray exposure apparatus, X-ray exposure method, X-ray mask, X-ray mirror, synchrotron radiation apparatus, synchrotron radiation method and semiconductor device

CANON KK3 citations61