Inventor
NORIOKA SETSUO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “NORIOKA SETSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JEOL LTD
9 patentsUS4990778AFeb 5, 1991
Scanning electron microscope
JEOL LTD23 citations92
US5801382ASep 1, 1998
Method of analyzing foreign materials
JEOL LTD20 citations90
US6904164B2Jun 7, 2005
Method of inspecting accuracy in stitching pattern elements
JEOL LTD12 citations82
US5185530AFeb 9, 1993
Electron beam instrument
JEOL LTD17 citations73
US4547669AOct 15, 1985
Electron beam scanning device
JEOL LTD12 citations73
US4393309AJul 12, 1983
Method and apparatus for controlling the objective lens in a scanning electron microscope or the like
JEOL LTD11 citations73
US6734437B2May 11, 2004
System and method for electron beam irradiation
JEOL LTD8 citations72
US4417145ANov 22, 1983
Apparatus for controlling magnetic field intensity
JEOL LTD6 citations62
US4439681AMar 27, 1984
Charged particle beam scanning device
JEOL LTD6 citations61
SONY CORP
3 patentsUS6737660B2May 18, 2004
Electron beam irradiation apparatus and electron beam irradiating method
SONY CORP13 citations82
US6953939B2Oct 11, 2005
Testing apparatus using scanning electron microscope
SONY CORP9 citations72
US6831278B2Dec 14, 2004
System and method for electron beam irradiation
SONY CORP12 citations72