Inventor
TSUKAKOSHI TOSHIO
JP4 patents
Patents
4 patentsUS6961115B2Nov 1, 2005
Specification determining method, projection optical system making method and adjusting method, exposure apparatus and making method thereof, and computer system
NIKON CORP45 citations94
US6296977B1Oct 2, 2001
Method for the measurement of aberration of optical projection system
NIKON CORP55 citations90
US7075651B2Jul 11, 2006
Image forming characteristics measuring method, image forming characteristics adjusting method, exposure method and apparatus, program and storage medium, and device manufacturing method
NIKON CORP28 citations89
US7215408B2May 8, 2007
Specification determining method, projection optical system making method and adjusting method, exposure apparatus and making method thereof, and computer system
NIKON CORP13 citations82