Inventor
TROW JOHN R
US14 patents
Patents
14 patentsUS5888414AMar 30, 1999
Plasma reactor and processes using RF inductive coupling and scavenger temperature control
APPLIED MATERIALS INC203 citations99
US6518195B1Feb 11, 2003
Plasma reactor using inductive RF coupling, and processes
APPLIED MATERIALS INC162 citations98
US6068784AMay 30, 2000
Process used in an RF coupled plasma reactor
APPLIED MATERIALS INC173 citations98
US5556501ASep 17, 1996
Silicon scavenger in an inductively coupled RF plasma reactor
APPLIED MATERIALS INC396 citations98
US5350479ASep 27, 1994
Electrostatic chuck for high power plasma processing
APPLIED MATERIALS INC199 citations98
US5187454AFeb 16, 1993
Electronically tuned matching network using predictor-corrector control system
APPLIED MATERIALS INC165 citations98
US6545420B1Apr 8, 2003
Plasma reactor using inductive RF coupling, and processes
APPLIED MATERIALS INC135 citations97
US6488807B1Dec 3, 2002
Magnetic confinement in a plasma reactor having an RF bias electrode
APPLIED MATERIALS INC145 citations97
US6251792B1Jun 26, 2001
Plasma etch processes
APPLIED MATERIALS INC122 citations97
US5583737ADec 10, 1996
Electrostatic chuck usable in high density plasma
APPLIED MATERIALS INC57 citations96
US5539609AJul 23, 1996
Electrostatic chuck usable in high density plasma
APPLIED MATERIALS INC60 citations95
US5346579ASep 13, 1994
Magnetic field enhanced plasma processing chamber
APPLIED MATERIALS INC96 citations95
US6634313B2Oct 21, 2003
High-frequency electrostatically shielded toroidal plasma and radical source
APPLIED MATERIALS INC42 citations92
US5349313ASep 20, 1994
Variable RF power splitter
APPLIED MATERIALS INC53 citations92