Inventor
NEZU HIROKI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “NEZU HIROKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
3 patentsUS5498768AMar 12, 1996
Process for forming multilayer wiring
HITACHI LTD60 citations96
US6565422B1May 20, 2003
Polishing apparatus using substantially abrasive-free liquid with mixture unit near polishing unit, and plant using the polishing apparatus
HITACHI LTD29 citations92
US5670421ASep 23, 1997
Process for forming multilayer wiring
HITACHI LTD31 citations92