Inventor
TERASAKA KUNIHIRO
JP3 patents
Patents
3 patentsUS5502010AMar 26, 1996
Method for heat treating a semiconductor substrate to reduce defects
TOSHIBA KK122 citations96
US6462373B2Oct 8, 2002
Nonvolatile semiconductor memory device having tapered portion on side wall of charge accumulation layer
TOSHIBA KK27 citations92
US5885905AMar 23, 1999
Semiconductor substrate and method of processing the same
TOSHIBA KK26 citations90