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Inventor
YASUHISA NAOHIKO
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “YASUHISA NAOHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
2 patents
US5502010A
Mar 26, 1996
Method for heat treating a semiconductor substrate to reduce defects
TOSHIBA KK
122 citations
96
US5885905A
Mar 23, 1999
Semiconductor substrate and method of processing the same
TOSHIBA KK
26 citations
90
TEL SAGAMI LTD
1 patent
US5318633A
Jun 7, 1994
Heat treating apparatus
TEL SAGAMI LTD
35 citations
91