Inventor
ASAKURA KENTARO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “ASAKURA KENTARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS7422655B2Sep 9, 2008
Apparatus for performing semiconductor processing on target substrate
TOKYO ELECTRON LTD10 citations82
US10221478B2Mar 5, 2019
Film formation device
TOKYO ELECTRON LTD1 citations61
US12094753B2Sep 17, 2024
Stage device and substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US11774298B2Oct 3, 2023
Multi-point thermocouples and assemblies for ceramic heating structures
TOKYO ELECTRON LTD0 citations56
US7989353B2Aug 2, 2011
Method for in-situ refurbishing a ceramic substrate holder
TOKYO ELECTRON LTD0 citations50
US11664266B2May 30, 2023
Substrate processing apparatus and substrate delivery method
TOKYO ELECTRON LTD0 citations49
US12438033B2Oct 7, 2025
Substrate placing method and substrate placing mechanism
TOKYO ELECTRON LTD0 citations48