Inventor

CHI SUNG-HUN

KR3 patents

⚠️ This page may combine multiple inventors who share the name “CHI SUNG-HUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HYUNDIA ELECTRONICS IND CO LTD

1 patent

US6146542ANov 14, 2000

Dry etching method of multilayer film

HYUNDIA ELECTRONICS IND CO LTD20 citations85

HYUNDAI ELECTRONICS IND

1 patent

US6225220B1May 1, 2001

Plug forming method for semiconductor device

HYUNDAI ELECTRONICS IND6 citations59

LG SEMICON CO LTD

1 patent

US6090719AJul 18, 2000

Dry etching method for multilayer film

LG SEMICON CO LTD0 citations48