Inventor
HA JAE-HEE
KR18 patents
⚠️ This page may combine multiple inventors who share the name “HA JAE-HEE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LG SEMICON CO LTD
9 patentsUS5990020ANov 23, 1999
Method for forming a conductive plug
LG SEMICON CO LTD23 citations92
US6039888AMar 21, 2000
Method of etching an organic anti-reflective coating
LG SEMICON CO LTD27 citations86
US6482734B1Nov 19, 2002
Diffusion barrier layer for semiconductor device and fabrication method thereof
LG SEMICON CO LTD10 citations73
US6077777AJun 20, 2000
Method for forming wires of semiconductor device
LG SEMICON CO LTD11 citations73
US6069785AMay 30, 2000
Method for restoring an electrostatic chuck force
LG SEMICON CO LTD10 citations73
US5976395ANov 2, 1999
Selective etching method for stacked organic film
LG SEMICON CO LTD7 citations73
US6831362B2Dec 14, 2004
Diffusion barrier layer for semiconductor device and fabrication method thereof
LG SEMICON CO LTD4 citations62
US6130153AOct 10, 2000
Interconnection fabrication method for semiconductor device
LG SEMICON CO LTD2 citations62
US6090719AJul 18, 2000
Dry etching method for multilayer film
LG SEMICON CO LTD0 citations48
HYUNDAI ELECTRONICS IND
4 patentsUS6718293B1Apr 6, 2004
Etching and growth simulation method using a modified cell model
HYUNDAI ELECTRONICS IND4 citations61
US6225220B1May 1, 2001
Plug forming method for semiconductor device
HYUNDAI ELECTRONICS IND6 citations59
US6316166B1Nov 13, 2001
Method of forming micro pattern of semiconductor device
HYUNDAI ELECTRONICS IND3 citations57
US6429140B1Aug 6, 2002
Method of etching of photoresist layer
HYUNDAI ELECTRONICS IND3 citations54