Inventor
OPOWER HANS
DE40 patents
⚠️ This page may combine multiple inventors who share the name “OPOWER HANS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DEUTSCHE FORSCH LUFT RAUMFAHRT
19 patentsUS5725914AMar 10, 1998
Process and apparatus for producing a functional structure of a semiconductor component
DEUTSCHE FORSCH LUFT RAUMFAHRT96 citations98
US5492861AFeb 20, 1996
Process for applying structured layers using laser transfer
DEUTSCHE FORSCH LUFT RAUMFAHRT75 citations96
US4939738AJul 3, 1990
High-power waveguide laser
DEUTSCHE FORSCH LUFT RAUMFAHRT89 citations96
US5874929AFeb 23, 1999
Apparatus for producing an image
DEUTSCHE FORSCH LUFT RAUMFAHRT48 citations92
US5818546AOct 6, 1998
Apparatus for imaging exit spots of a laser array
DEUTSCHE FORSCH LUFT RAUMFAHRT34 citations92
US5736464AApr 7, 1998
Process and apparatus for producing a functional structure of a semiconductor component
DEUTSCHE FORSCH LUFT RAUMFAHRT31 citations92
US5513195AApr 30, 1996
Phase-controlled, fractal laser system
DEUTSCHE FORSCH LUFT RAUMFAHRT23 citations92
US5729568AMar 17, 1998
Power-controlled, fractal laser system
DEUTSCHE FORSCH LUFT RAUMFAHRT36 citations91
US5324552AJun 28, 1994
Process for coating substrate material
DEUTSCHE FORSCH LUFT RAUMFAHRT39 citations88
US5220577AJun 15, 1993
Waveguide laser with variable waveguide thickness
DEUTSCHE FORSCH LUFT RAUMFAHRT17 citations74
US5206874AApr 27, 1993
Solid-state laser
DEUTSCHE FORSCH LUFT RAUMFAHRT12 citations74
US5097479AMar 17, 1992
Folded waveguide laser
DEUTSCHE FORSCH LUFT RAUMFAHRT19 citations74
US4961201AOct 2, 1990
Waveguide configuration
DEUTSCHE FORSCH LUFT RAUMFAHRT12 citations74
US4930138AMay 29, 1990
Waveguide laser system
DEUTSCHE FORSCH LUFT RAUMFAHRT10 citations74
US5373525ADec 13, 1994
Wave guide laser having a resonator mirror with successive reflecting segments and out coupling openings arranged in an azimuthal direction
DEUTSCHE FORSCH LUFT RAUMFAHRT13 citations71
US6013130AJan 11, 2000
Process and device for the production of epitaxial layers
DEUTSCHE FORSCH LUFT RAUMFAHRT10 citations64
US5528619AJun 18, 1996
Gas discharge structure
DEUTSCHE FORSCH LUFT RAUMFAHRT4 citations60
US5209944AMay 11, 1993
Process for coating a substrate using a pulsed laser beam
DEUTSCHE FORSCH LUFT RAUMFAHRT6 citations58
US5204931AApr 20, 1993
Flexible waveguide
DEUTSCHE FORSCH LUFT RAUMFAHRT5 citations54
DEUTSCH ZENTR LUFT & RAUMFAHRT
5 patentsUS6002466ADec 14, 1999
Lithography exposure device
DEUTSCH ZENTR LUFT & RAUMFAHRT60 citations95
US6586169B2Jul 1, 2003
Lithography exposure device and lithography process
DEUTSCH ZENTR LUFT & RAUMFAHRT16 citations83
US6157755ADec 5, 2000
Laser system
DEUTSCH ZENTR LUFT & RAUMFAHRT19 citations83
US6570896B2May 27, 2003
Laser radiation source and process for generating a coherent total laser radiation field
DEUTSCH ZENTR LUFT & RAUMFAHRT7 citations70
US6741225B1May 25, 2004
Device for generating an image
DEUTSCH ZENTR LUFT & RAUMFAHRT0 citations41
HERAEUS GMBH W C
5 patentsUS4646314AFeb 24, 1987
High-power laser having an unstable optical resonator
HERAEUS GMBH W C8 citations74
US4611329ASep 9, 1986
Gas laser
HERAEUS GMBH W C7 citations74
US4553242ANov 12, 1985
Gas laser
HERAEUS GMBH W C4 citations63
US4551608ANov 5, 1985
Material working apparatus
HERAEUS GMBH W C5 citations63
US4688229AAug 18, 1987
Gas laser structure, particularly CO2 laser
HERAEUS GMBH W C0 citations42
KLEO HALBLEITERTECHNIK GMBH
4 patentsUS7019818B2Mar 28, 2006
Apparatus for exposing substrate materials
KLEO HALBLEITERTECHNIK GMBH9 citations71
US7652750B2Jan 26, 2010
Lithography exposure device having a plurality of radiation sources
KLEO HALBLEITERTECHNIK GMBH5 citations60
US6859261B2Feb 22, 2005
Lithography exposure device
KLEO HALBLEITERTECHNIK GMBH3 citations60
US8027018B2Sep 27, 2011
Method and device for producing exposed structures
KLEO HALBLEITERTECHNIK GMBH3 citations54