Inventor
SCHARL STEFAN
DE6 patents
⚠️ This page may combine multiple inventors who share the name “SCHARL STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLEO HALBLEITERTECHNIK GMBH
4 patentsUS7019818B2Mar 28, 2006
Apparatus for exposing substrate materials
KLEO HALBLEITERTECHNIK GMBH9 citations71
US7652750B2Jan 26, 2010
Lithography exposure device having a plurality of radiation sources
KLEO HALBLEITERTECHNIK GMBH5 citations60
US6859261B2Feb 22, 2005
Lithography exposure device
KLEO HALBLEITERTECHNIK GMBH3 citations60
US8027018B2Sep 27, 2011
Method and device for producing exposed structures
KLEO HALBLEITERTECHNIK GMBH3 citations54