Inventor
PASTEL PAUL W
US10 patents
⚠️ This page may combine multiple inventors who share the name “PASTEL PAUL W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
8 patentsUS5981148ANov 9, 1999
Method for forming sidewall spacers using frequency doubling hybrid resist and device formed thereby
IBM49 citations96
US6403393B1Jun 11, 2002
Device having integrated optical and copper conductors and method of fabricating same
IBM34 citations92
US5976768ANov 2, 1999
Method for forming sidewall spacers using frequency doubling hybrid resist and device formed thereby
IBM31 citations92
US5498313AMar 12, 1996
Symmetrical etching ring with gas control
IBM41 citations89
US6197656B1Mar 6, 2001
Method of forming planar isolation and substrate contacts in SIMOX-SOI.
IBM17 citations84
US6015745AJan 18, 2000
Method for semiconductor fabrication
IBM6 citations63
US6387596B2May 14, 2002
Method of forming resist images by periodic pattern removal
IBM5 citations62
US7230335B2Jun 12, 2007
Inspection methods and structures for visualizing and/or detecting specific chip structures
IBM1 citations50