Inventor
MURPHY NEAL T
US6 patents
Patents
6 patentsUS6634368B1Oct 21, 2003
Application of ozonated DI water to scrubbers for resist strip and particle removal processes
TEXAS INSTRUMENTS INC26 citations89
US6399513B1Jun 4, 2002
Ozonated DI water process for organic residue and metal removal processes
TEXAS INSTRUMENTS INC7 citations68
US6387822B1May 14, 2002
Application of an ozonated DI water spray to resist residue removal processes
TEXAS INSTRUMENTS INC10 citations68
US7695589B2Apr 13, 2010
Versatile system for conditioning slurry in CMP process
TEXAS INSTRUMENTS INC3 citations61
US6497055B2Dec 24, 2002
System and method for controlling a vapor dryer process
TEXAS INSTRUMENTS INC2 citations56
US6643952B2Nov 11, 2003
System and method for controlling a vapor dryer process
TEXAS INSTRUMENTS INC1 citations45