Inventor
WEAVER ROBERT A
US20 patents
⚠️ This page may combine multiple inventors who share the name “WEAVER ROBERT A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMITOOL INC
17 patentsUS6565729B2May 20, 2003
Method for electrochemically depositing metal on a semiconductor workpiece
SEMITOOL INC435 citations99
US5947718ASep 7, 1999
Semiconductor processing furnace
SEMITOOL INC502 citations99
US6254742B1Jul 3, 2001
Diffuser with spiral opening pattern for an electroplating reactor vessel
SEMITOOL INC130 citations97
US6471913B1Oct 29, 2002
Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature
SEMITOOL INC66 citations96
US5846073ADec 8, 1998
Semiconductor furnace processing vessel base
SEMITOOL INC52 citations96
US7332066B2Feb 19, 2008
Apparatus and method for electrochemically depositing metal on a semiconductor workpiece
SEMITOOL INC19 citations93
US7160421B2Jan 9, 2007
Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
SEMITOOL INC24 citations92
US7102763B2Sep 5, 2006
Methods and apparatus for processing microelectronic workpieces using metrology
SEMITOOL INC22 citations92
US6780374B2Aug 24, 2004
Method and apparatus for processing a microelectronic workpiece at an elevated temperature
SEMITOOL INC23 citations92
US5908292AJun 1, 1999
Semiconductor processing furnace outflow cooling system
SEMITOOL INC42 citations89
US5904478AMay 18, 1999
Semiconductor processing furnace heating subassembly
SEMITOOL INC24 citations86
US7189318B2Mar 13, 2007
Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
SEMITOOL INC16 citations84
US7115196B2Oct 3, 2006
Apparatus and method for electrochemically depositing metal on a semiconductor workpiece
SEMITOOL INC11 citations84
US7020537B2Mar 28, 2006
Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
SEMITOOL INC12 citations84
US6030208AFeb 29, 2000
Thermal processor
SEMITOOL INC32 citations84
US6861027B2Mar 1, 2005
Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature
SEMITOOL INC7 citations74
US6881309B2Apr 19, 2005
Diffuser with spiral opening pattern for electroplating reactor vessel
SEMITOOL INC1 citations50