Inventor
LIM SENG-KEONG VICTOR
SG6 patents
Patents
6 patentsUS6380106B1Apr 30, 2002
Method for fabricating an air gap metallization scheme that reduces inter-metal capacitance of interconnect structures
CHARTERED SEMICONDUCTOR MFG84 citations97
US7902548B2Mar 8, 2011
Planar voltage contrast test structure
CHARTERED SEMICONDUCTOR MFG84 citations96
US6613649B2Sep 2, 2003
Method for buffer STI scheme with a hard mask layer as an oxidation barrier
CHARTERED SEMICONDUCTOR MFG16 citations83
US6613648B1Sep 2, 2003
Shallow trench isolation using TEOS cap and polysilicon pullback
CHARTERED SEMICONDUCTOR MFG5 citations62
US7160741B2Jan 9, 2007
Planar voltage contrast test structure and method
CHARTERED SEMICONDUCTOR MFG4 citations61
US7052372B2May 30, 2006
Chemical-mechanical polisher hardware design
CHARTERED SEMICONDUCTOR MFG1 citations42