Inventor
GOH WANG LING
SG18 patents
⚠️ This page may combine multiple inventors who share the name “GOH WANG LING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHARTERED SEMICONDUCTOR MFG
15 patentsUS6376376B1Apr 23, 2002
Method to prevent CU dishing during damascene formation
CHARTERED SEMICONDUCTOR MFG60 citations96
US6380084B1Apr 30, 2002
Method to form high performance copper damascene interconnects by de-coupling via and metal line filling
CHARTERED SEMICONDUCTOR MFG59 citations94
US6613652B2Sep 2, 2003
Method for fabricating SOI devices with option of incorporating air-gap feature for better insulation and performance
CHARTERED SEMICONDUCTOR MFG28 citations92
US6403484B1Jun 11, 2002
Method to achieve STI planarization
CHARTERED SEMICONDUCTOR MFG23 citations92
US6841847B2Jan 11, 2005
3-D spiral stacked inductor on semiconductor material
CHARTERED SEMICONDUCTOR MFG41 citations91
US6468880B1Oct 22, 2002
Method for fabricating complementary silicon on insulator devices using wafer bonding
CHARTERED SEMICONDUCTOR MFG14 citations84
US6613649B2Sep 2, 2003
Method for buffer STI scheme with a hard mask layer as an oxidation barrier
CHARTERED SEMICONDUCTOR MFG16 citations83
US6849928B2Feb 1, 2005
Dual silicon-on-insulator device wafer die
CHARTERED SEMICONDUCTOR MFG6 citations74
US7721414B2May 25, 2010
Method of manufacturing 3-D spiral stacked inductor on semiconductor material
CHARTERED SEMICONDUCTOR MFG6 citations72
US6998682B2Feb 14, 2006
Method of forming a partially depleted silicon on insulator (PDSOI) transistor with a pad lock body extension
CHARTERED SEMICONDUCTOR MFG9 citations71
US6905919B2Jun 14, 2005
Method of forming a partially depleted silicon on insulator (PDSOI) transistor with a pad lock body extension
CHARTERED SEMICONDUCTOR MFG8 citations71
US7060573B2Jun 13, 2006
Extended poly buffer STI scheme
CHARTERED SEMICONDUCTOR MFG2 citations63
US6613648B1Sep 2, 2003
Shallow trench isolation using TEOS cap and polysilicon pullback
CHARTERED SEMICONDUCTOR MFG5 citations62
US6399471B1Jun 4, 2002
Assorted aluminum wiring design to enhance chip-level performance for deep sub-micron application
CHARTERED SEMICONDUCTOR MFG4 citations62
US6472697B2Oct 29, 2002
Assorted aluminum wiring design to enhance chip-level performance for deep sub-micron application
CHARTERED SEMICONDUCTOR MFG0 citations52