Inventor
RICHTER ERNST-CHRISTIAN
DE12 patents
⚠️ This page may combine multiple inventors who share the name “RICHTER ERNST-CHRISTIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
11 patentsUS6703190B2Mar 9, 2004
Method for producing resist structures
INFINEON TECHNOLOGIES AG112 citations96
US6887653B2May 3, 2005
Method for structuring a photoresist layer
INFINEON TECHNOLOGIES AG2 citations62
US6841332B2Jan 11, 2005
Photoresist compound and method for structuring a photoresist layer
INFINEON TECHNOLOGIES AG5 citations62
US6746828B2Jun 8, 2004
Process for structuring a photoresist layer
INFINEON TECHNOLOGIES AG2 citations62
US6746821B2Jun 8, 2004
Method of structuring a photoresist layer
INFINEON TECHNOLOGIES AG3 citations62
US6746827B2Jun 8, 2004
Process for structuring a photoresist layer
INFINEON TECHNOLOGIES AG5 citations62
US6740475B2May 25, 2004
Method for structuring a photoresist layer
INFINEON TECHNOLOGIES AG4 citations62
US6800407B2Oct 5, 2004
Method for experimentally verifying imaging errors in photomasks
INFINEON TECHNOLOGIES AG2 citations61
US6696208B2Feb 24, 2004
Method for experimentally verifying imaging errors in optical exposure units
INFINEON TECHNOLOGIES AG4 citations61
US6743572B2Jun 1, 2004
Method for structuring a photoresist layer
INFINEON TECHNOLOGIES AG1 citations51
US6899997B2May 31, 2005
Process for modifying resist structures and resist films from the aqueous phase
INFINEON TECHNOLOGIES AG0 citations33