Inventor

GROSS KENNETH P

US31 patents

⚠️ This page may combine multiple inventors who share the name “GROSS KENNETH P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GROSS KENNETH P

KLA TENCOR CORP

Process and assembly for non-destructive surface inspections

Process and assembly for non-destructive surface inspections

Process and assembly for non-destructive surface inspections

System and method for imaging a sample with a laser sustained plasma illumination output

Method and system for controlling convective flow in a light-sustained plasma

Laser sustained plasma light source with forced flow through natural convection

Laser sustained plasma light source with graded absorption features

Process and assembly for non-destructive surface inspections

System and method for inhibiting radiative emission of a laser-sustained plasma source

System and method for inhibiting VUV radiative emission of a laser-sustained plasma source

Optical scanning using rotating parallel plate

Non-contact thermal measurements of VUV optics

Method and system for controlling convective flow in a light-sustained plasma

System and method for imaging a sample with an illumination source modified by a spatial selective wavelength filter

Wideband spectrograph

KLA TENCOR TECH CORP

Apparatus and methods for detecting overlay errors using scatterometry

Systems and methods for measuring one or more characteristics of patterned features on a specimen

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals

System for measuring periodic structures

TENCOR INSTRUMENTS

Surface scanner with thin film gauge

Particle detector for rough surfaces

Surface scanning apparatus and method using crossed-cylinder optical elements

Position location in surface scanning using interval timing between scan marks on test wafers

SCHWIERKING ROGER A

Apparatus and method for effectuating temperature control in roller grills

Method for effectuating temperature control in roller grills

PACIFIC SCIENTIFIC CO

Particle counter air inlet assembly

KLA TECHNOLOGIES CORP

Systems for measuring periodic structures

SILICON LIGHT MACHINES INC

Display apparatus including RGB color combiner and 1D light valve relay including schlieren filter

GROSS KENNETH P

Cell for light source