Inventor
HIROO YASUMASA
JP14 patents
⚠️ This page may combine multiple inventors who share the name “HIROO YASUMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
10 patentsUS7822500B2Oct 26, 2010
Polishing apparatus and polishing method
EBARA CORP50 citations98
US7313452B2Dec 25, 2007
Substrate transfer controlling apparatus and substrate transferring method
EBARA CORP23 citations92
US7072730B2Jul 4, 2006
Substrate transfer controlling apparatus and substrate transferring method
EBARA CORP25 citations92
US6772029B2Aug 3, 2004
Wafer transfer control apparatus and method for transferring wafer
EBARA CORP17 citations92
US11458589B2Oct 4, 2022
Polishing apparatus and polishing member dressing method
EBARA CORP2 citations72
US10828747B2Nov 10, 2020
Substrate polishing apparatus and method
EBARA CORP5 citations72
US9437507B2Sep 6, 2016
Method of correcting film thickness measurement value, film thickness corrector and eddy current sensor
EBARA CORP3 citations72
US11945075B2Apr 2, 2024
Polishing apparatus and polishing member dressing method
EBARA CORP0 citations62
US12420378B2Sep 23, 2025
Substrate processing apparatus and method for controlling dressing of polishing member
EBARA CORP0 citations51
US9440327B2Sep 13, 2016
Polishing apparatus and polishing method
EBARA CORP1 citations51
KOBAYASHI YOICHI
4 patentsUS8246417B2Aug 21, 2012
Polishing apparatus and polishing method
KOBAYASHI YOICHI16 citations83
US8078419B2Dec 13, 2011
Polishing monitoring method and polishing apparatus
KOBAYASHI YOICHI8 citations83
US8398456B2Mar 19, 2013
Polishing method, polishing apparatus and method of monitoring a substrate
KOBAYASHI YOICHI5 citations72
US8112169B2Feb 7, 2012
Polishing apparatus and polishing method
KOBAYASHI YOICHI2 citations62