Inventor
SINHA ASHOK
US39 patents
⚠️ This page may combine multiple inventors who share the name “SINHA ASHOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
30 patentsUS6551929B1Apr 22, 2003
Bifurcated deposition process for depositing refractory metal layers employing atomic layer deposition and chemical vapor deposition techniques
APPLIED MATERIALS INC396 citations99
US6176667B1Jan 23, 2001
Multideck wafer processing system
APPLIED MATERIALS INC333 citations99
US6129044AOct 10, 2000
Apparatus for substrate processing with improved throughput and yield
APPLIED MATERIALS INC578 citations99
US5856240AJan 5, 1999
Chemical vapor deposition of a thin film onto a substrate
APPLIED MATERIALS INC275 citations99
US5846332ADec 8, 1998
Thermally floating pedestal collar in a chemical vapor deposition chamber
APPLIED MATERIALS INC863 citations99
US6189482B1Feb 20, 2001
High temperature, high flow rate chemical vapor deposition apparatus and related methods
APPLIED MATERIALS INC447 citations98
US6136163AOct 24, 2000
Apparatus for electro-chemical deposition with thermal anneal chamber
APPLIED MATERIALS INC569 citations98
US5964947AOct 12, 1999
Removable pumping channel liners within a chemical vapor deposition chamber
APPLIED MATERIALS INC96 citations98
US5855681AJan 5, 1999
Ultra high throughput wafer vacuum processing system
APPLIED MATERIALS INC1,143 citations98
US5695568ADec 9, 1997
Chemical vapor deposition chamber
APPLIED MATERIALS INC95 citations97
US7709385B2May 4, 2010
Method for depositing tungsten-containing layers by vapor deposition techniques
APPLIED MATERIALS INC33 citations96
US7674715B2Mar 9, 2010
Method for forming tungsten materials during vapor deposition processes
APPLIED MATERIALS INC35 citations96
US7465666B2Dec 16, 2008
Method for forming tungsten materials during vapor deposition processes
APPLIED MATERIALS INC47 citations96
US7465665B2Dec 16, 2008
Method for depositing tungsten-containing layers by vapor deposition techniques
APPLIED MATERIALS INC43 citations96
US7235486B2Jun 26, 2007
Method for forming tungsten materials during vapor deposition processes
APPLIED MATERIALS INC43 citations96
US7115494B2Oct 3, 2006
Method and system for controlling the presence of fluorine in refractory metal layers
APPLIED MATERIALS INC30 citations96
US7101795B1Sep 5, 2006
Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer
APPLIED MATERIALS INC50 citations96
US7033922B2Apr 25, 2006
Method and system for controlling the presence of fluorine in refractory metal layers
APPLIED MATERIALS INC30 citations96
US6849545B2Feb 1, 2005
System and method to form a composite film stack utilizing sequential deposition techniques
APPLIED MATERIALS INC54 citations96
US6399479B1Jun 4, 2002
Processes to improve electroplating fill
APPLIED MATERIALS INC74 citations96
US6270859B2Aug 7, 2001
Plasma treatment of titanium nitride formed by chemical vapor deposition
APPLIED MATERIALS INC42 citations96
US5882419AMar 16, 1999
Chemical vapor deposition chamber
APPLIED MATERIALS INC46 citations96
US5384008AJan 24, 1995
Process and apparatus for full wafer deposition
APPLIED MATERIALS INC72 citations96
US6296712B1Oct 2, 2001
Chemical vapor deposition hardware and process
APPLIED MATERIALS INC68 citations94
US5201990AApr 13, 1993
Process for treating aluminum surfaces in a vacuum apparatus
APPLIED MATERIALS INC23 citations93
US7220673B2May 22, 2007
Method for depositing tungsten-containing layers by vapor deposition techniques
APPLIED MATERIALS INC29 citations92
US6123864ASep 26, 2000
Etch chamber
APPLIED MATERIALS INC21 citations92
US6270621B1Aug 7, 2001
Etch chamber
APPLIED MATERIALS INC9 citations73
US6893548B2May 17, 2005
Method of conditioning electrochemical baths in plating technology
APPLIED MATERIALS INC5 citations63
US8048806B2Nov 1, 2011
Methods to avoid unstable plasma states during a process transition
APPLIED MATERIALS INC5 citations62
SUNPREME LTD
3 patentsUS7960644B2Jun 14, 2011
Low-cost multi-junction solar cells and methods for their production
SUNPREME LTD7 citations83
US7951640B2May 31, 2011
Low-cost multi-junction solar cells and methods for their production
SUNPREME LTD13 citations83
US7956283B2Jun 7, 2011
Low-cost solar cells and methods for their production
SUNPREME LTD0 citations51
SINHA ASHOK
3 patentsUS9577140B2Feb 21, 2017
Low-cost solar cell metallization over TCO and methods of their fabrication
SINHA ASHOK3 citations65
US8796066B2Aug 5, 2014
Low-cost solar cells and methods for fabricating low cost substrates for solar cells
SINHA ASHOK0 citations50
US8084683B2Dec 27, 2011
Low-cost multi-junction solar cells and methods for their production
SINHA ASHOK1 citations50