Inventor

SAM JOSE TONG

US3 patents

⚠️ This page may combine multiple inventors who share the name “SAM JOSE TONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US7708859B2May 4, 2010

Gas distribution system having fast gas switching capabilities

LAM RES CORP268 citations98

US8343876B2Jan 1, 2013

Fast gas switching plasma processing apparatus

LAM RES CORP10 citations83

HUANG ZHISONG

1 patent

US8673785B2Mar 18, 2014

Gas distribution system having fast gas switching capabilities

HUANG ZHISONG10 citations81