Inventor

MIRRING ENNO

DE2 patents

Patents

2 patents

US9117637B2Aug 25, 2015

Redundant anode sputtering method and assembly

TESCHNER GOETZ0 citations33

US8980072B2Mar 17, 2015

Method and arrangement for redundant anode sputtering having a dual anode arrangement

TESCHNER GOETZ0 citations31