Inventor
NOMURA NORIHIKO
JP10 patents
Patents
10 patentsUS6332925B1Dec 25, 2001
Evacuation system
EBARA CORP46 citations92
US6158226ADec 12, 2000
Trapping device
EBARA CORP19 citations92
US6051053AApr 18, 2000
Trapping device and method of operation therefor
EBARA CORP20 citations92
US7635501B2Dec 22, 2009
Exhaust pipe having means for preventing deposition of a reaction by-product and method for preventing deposition of a reaction by-product
EBARA CORP10 citations83
US6554879B1Apr 29, 2003
Trap apparatus
EBARA CORP16 citations82
US7217306B2May 15, 2007
Trap apparatus
EBARA CORP5 citations73
US6464466B1Oct 15, 2002
Trap apparatus
EBARA CORP6 citations73
US6368371B1Apr 9, 2002
Trap device and trap system
EBARA CORP9 citations73
US6553811B2Apr 29, 2003
Trap apparatus
EBARA CORP4 citations62
US6763700B2Jul 20, 2004
Trap apparatus
EBARA CORP0 citations52