Inventor

NIU XINHUI

US42 patents

⚠️ This page may combine multiple inventors who share the name “NIU XINHUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIU XINHUI

TIMBRE TECH INC

Generation of a library of periodic grating diffraction signals

Method and system of dynamic learning through a regression-based library generation process

Overlay measurements using periodic gratings

Grating test patterns and methods for overlay metrology

Optical profilometry of additional-material deviations in a periodic grating

Model and parameter selection for optical metrology

Model optimization for structures with additional materials

Azimuthal scanning of a structure formed on a semiconductor wafer

Generic interface for an optical metrology system

Caching of intra-layer calculations for rapid rigorous coupled-wave analyses

Optical metrology of single features

Generation of a library of periodic grating diffraction signals

Generation and use of integrated circuit profile-based simulation information

Generating a library of simulated-diffraction signals and hypothetical profiles of periodic gratings

Method and system for dynamic learning through a regression-based library generation process

Grating test patterns and methods for overlay metrology

Optical profilometry of additional-material deviations in a periodic grating

Balancing planarization of layers and the effect of underlying structure on the metrology signal

System and method for characterizing macro-grating test patterns in advanced lithography and etch processes

Overlay measurements using zero-order cross polarization measurements

Overlay measurements using zero-order cross polarization measurements

System and method for grating profile classification

Profiler business model

Generic interface for an optical metrology system

Optical metrology of single features

Caching of intra-layer calculations for rapid rigorous coupled-wave analyses

Model and parameter selection for optical metrology

Azimuthal scanning of a structure formed on a semiconductor wafer

Optical metrology of single features

Generic interface for an optical metrology system

System and method for characterizing macro-grating test patterns in advanced lithography and etch processes

Combined optical profilometry and projection microscopy of integrated circuit structures

Generating simulated diffraction signals for two-dimensional structures

System and method for efficient simulation of reflectometry response from two-dimensional grating structures

Measurement of metal electroplating and seed layer thickness and profile

Balancing planarization of layers and the effect of underlying structure on the metrology signal

Method and system of dynamic learning through a regression-based library generation process

TOKYO ELECTRON LTD

Generation and use of integrated circuit profile-based simulation information

Generation of a library of periodic grating diffraction signals

Approximating eigensolutions for use in determining the profile of a structure formed on a semiconductor wafer

Optical metrology of single features

TIMBRE TECHNOLOGY INC

Method and apparatus for the determination of mask rules using scatterometry