Inventor
OH WAN-SUK
KR7 patents
⚠️ This page may combine multiple inventors who share the name “OH WAN-SUK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EUGENE TECHNOLOGY CO LTD
5 patentsUS10006121B2Jun 26, 2018
Method and apparatus for manufacturing three-dimensional-structure memory device
EUGENE TECHNOLOGY CO LTD1 citations50
US9741562B2Aug 22, 2017
Method for forming polysilicon film
EUGENE TECHNOLOGY CO LTD0 citations47
US10246773B2Apr 2, 2019
Method for forming amorphous thin film
EUGENE TECHNOLOGY CO LTD0 citations46
US9721798B2Aug 1, 2017
Method and apparatus for depositing amorphous silicon film
EUGENE TECHNOLOGY CO LTD0 citations37
US10796915B2Oct 6, 2020
Method for forming epitaxial layer at low temperature
EUGENE TECHNOLOGY CO LTD0 citations36